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RF magnetron sputtering 방법에 의한 고온 초전도 박막 제조를 위한 조성 조절 및 열처리 효과 =

Other Titles

Composition control and annealing effects on the growth of YBaCuO superconducting thin films by RF magnetron sputtering.

Authors

HAHN TAEK SANG; CHOI SANG SAM; Kim Young Hwan; Sang-Seop Yom; 박순자

Issue Date

1989-01

URI

https://pubs.kist.re.kr/handle/201004/149120

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KIST Publication > Others

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