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dc.contributor.author한승희-
dc.contributor.author서민-
dc.contributor.author신상범-
dc.contributor.author강운현-
dc.contributor.author전신영-
dc.contributor.author조민경-
dc.date.accessioned2024-04-26T21:39:02Z-
dc.date.available2024-04-26T21:39:02Z-
dc.date.issued2024-04-17-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/149757-
dc.title저저항 배선재료 금속 필름 제조 방법 및 제조 장치-
dc.typePatent-
dc.date.registration2024-04-17-
dc.date.application2021-08-12-
dc.identifier.patentRegistrationNumber10-2659491-
dc.identifier.patentApplicationNumber10-2021-0106878-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2021
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