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dc.contributor.author정호중-
dc.contributor.author한상욱-
dc.contributor.author서민교-
dc.contributor.author황현-
dc.contributor.author이한석-
dc.contributor.author허형준-
dc.date.accessioned2025-03-14T21:30:33Z-
dc.date.available2025-03-14T21:30:33Z-
dc.date.issued2025-03-06-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/151873-
dc.title리튬나이오베이트의 식각방법 및 이를 이용한 리튬나이오베이트의 패턴 형성방법-
dc.typePatent-
dc.date.registration2025-03-06-
dc.date.application2022-04-06-
dc.identifier.patentRegistrationNumber10-2780046-
dc.identifier.patentApplicationNumber10-2022-0042690-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2022
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