도금 패터닝 및 절연기능을 가진 기능성 폴리실세스퀴옥산 소재 및 이를 이용한 절연층 및 배선의 동시 형성 방법

Author
황승상홍순만백경열최유미이성수김선준구종민
Assignee
한국과학기술연구원
Regitration Date
2025-04-15
Registration No.
12276912
Application Date
2021-07-23
Application No.
17/384200
Country
US
URI
https://pubs.kist.re.kr/handle/201004/152587
Appears in Collections:
KIST Patent > 2021
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