DSpace at KISTKIST Patent2024

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dc.contributor.author김한-
dc.contributor.author장지수-
dc.contributor.author허성훈-
dc.contributor.author송현철-
dc.contributor.author백승협-
dc.contributor.author최지원-
dc.contributor.author김진상-
dc.contributor.author강종윤-
dc.contributor.author김성근-
dc.date.accessioned2026-03-27T21:30:06Z-
dc.date.available2026-03-27T21:30:06Z-
dc.date.issued2026-04-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/154534-
dc.title원자층증착법을 이용한 귀금속박막의 영역선택적 증착 방법-
dc.typePatent-
dc.date.registration2026-04-07-
dc.date.application2024-08-05-
dc.identifier.patentRegistrationNumber12595554-
dc.identifier.patentApplicationNumber18/794977-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2024
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