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Results 1-10 of 198 (Search time: 0.006 seconds).
Item hits:
Issue Date
Title
Author(s)
199201
Microscopy study for the batch fabrication of silicon diaphragm
하병주
;
주병권
;
차균현
;
오명환
;
김철주
200004
Vacuum packaging and operating properties of micro-tunneling sensors
주병권
;
박흥우
;
이덕중
;
손용배
;
박정호
;
오명환
200209
Hybrid microassembly system for three-dimensional MEMS components
김경환
;
김덕호
;
이석주
;
이재훈
199911
Fabrication of microbolometer using MEMS technology
강호관
;
김민철
;
하원호
;
문성욱
;
오명환
;
김도훈
199410
Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication
주병권
;
하병주
;
김근섭
;
송만호
;
김성환
;
김철주
;
차균현
;
오명환
200203
Principal and applications of nanoindentation test
한준희
;
이광렬
;
김광석
;
이상율
200004
Design and fabrication of a micro switch for logic devices
채경수
;
한승오
;
하종민
;
박정호
;
문성욱
200203
Implementation of a self-sensing MEMS cantilever for nanomanipulation
김덕호
;
김경환
;
홍재완
199608
FED 기술 강좌 : Amorphic diamond FEA 및 진공 실장 기술
주병권
;
오명환
199901
압전성 PZT 박막과 표면 마이크로머쉬닝 공정을 이용한 마이크로 칸틸레버 빔의 제작 및 그 문제점
윤영수
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-Author
97
주병권
94
오명환
32
문성욱
31
박정호
29
이윤희
20
이덕중
17
박흥우
15
김철주
15
윤영수
13
서상희
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-Subject
23
FED
19
FEA
15
micromachining
10
wafer bonding
8
PZT
7
microsensor
5
Microfluidics
4
Electrokinetics
4
energy harvesting
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microbolometer
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-Date issued
17
2010 - 2019
81
2000 - 2009
99
1990 - 1999
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