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dc.contributor.author서민아-
dc.contributor.author이상훈-
dc.contributor.author김진수-
dc.contributor.author박규환-
dc.contributor.author최종호-
dc.contributor.author김철기-
dc.date.accessioned2024-01-12T02:42:58Z-
dc.date.available2024-01-12T02:42:58Z-
dc.date.issued2018-11-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/76276-
dc.title메타물질 기반 센싱 소자를 이용한 박막의 전기적 특성 비접촉식 관찰 방법-
dc.typePatent-
dc.date.registration2018-11-15-
dc.date.application2017-09-15-
dc.identifier.patentRegistrationNumber10-1920870-
dc.identifier.patentApplicationNumber2017-0118866-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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