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dc.contributor.author강준현-
dc.contributor.author한일기-
dc.contributor.author권석준-
dc.contributor.author박준서-
dc.contributor.author박재관-
dc.contributor.author고형덕-
dc.contributor.author강구민-
dc.contributor.author김영환-
dc.date.accessioned2024-01-12T02:43:04Z-
dc.date.available2024-01-12T02:43:04Z-
dc.date.issued2019-08-19-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/76281-
dc.title가시광선 광원을 이용한 ITO 박막의 표면 평탄화 방법 및 장치-
dc.typePatent-
dc.date.registration2019-08-19-
dc.date.application2017-06-08-
dc.identifier.patentRegistrationNumber10-2013787-
dc.identifier.patentApplicationNumber2017-0071494-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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