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dc.contributor.author전영민-
dc.contributor.author김용수-
dc.contributor.author안준모-
dc.contributor.author서민아-
dc.contributor.author우덕하-
dc.contributor.author박민철-
dc.contributor.author변영태-
dc.contributor.author김철기-
dc.contributor.author이석-
dc.contributor.author김재헌-
dc.date.accessioned2024-01-12T03:38:12Z-
dc.date.available2024-01-12T03:38:12Z-
dc.date.issued2017-12-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/77021-
dc.title다중 가스셀 모듈을 이용한 극자외선 빔 생성장치-
dc.typePatent-
dc.date.registration2017-12-12-
dc.date.application2015-12-28-
dc.identifier.patentRegistrationNumber9844125-
dc.identifier.patentApplicationNumber14/979729-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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