패턴화된 캔틸레버 센서 및 그 제조방법

Author
황교선이정훈김태송이수현김상경
Assignee
한국과학기술연구원
Regitration Date
2012-03-05
Registration No.
10-1125604
Application Date
2010-03-11
Application No.
2010-0021602
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/77582
Appears in Collections:
KIST Patent > Others
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