Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Zhai, Min | - |
dc.contributor.author | Locquet, A. | - |
dc.contributor.author | Jung, Mi | - |
dc.contributor.author | Woo, Deokha | - |
dc.contributor.author | Citrin, D. S. | - |
dc.date.accessioned | 2024-01-12T04:08:43Z | - |
dc.date.available | 2024-01-12T04:08:43Z | - |
dc.date.created | 2022-05-27 | - |
dc.date.issued | 2021 | - |
dc.identifier.issn | 2162-2027 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/77785 | - |
dc.description.abstract | The structure and morphology of nanoporous alumina (NP Al2O3) films on Al substrates are investigated by terahertz (THz) reflectometry and scattering imaging. One inhomogeneous area is identified in THz C-scan results off specular conditions at various angles. The thickness of NP Al2O3 films calculated based on THz results is in excellent agreement with destructive cross-sectional field emission scanning electron microscopy (FE-SEM) measurements. | - |
dc.language | English | - |
dc.publisher | IEEE | - |
dc.title | Characterization of nanoporous alumina using terahertz reflectometry and scattering imaging | - |
dc.type | Conference | - |
dc.identifier.doi | 10.1109/IRMMW-THz50926.2021.9567113 | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) | - |
dc.citation.title | 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) | - |
dc.citation.conferencePlace | US | - |
dc.citation.conferencePlace | ELECTR NETWORK | - |
dc.citation.conferenceDate | 2021-08-30 | - |
dc.relation.isPartOf | 2021 46TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ) | - |
dc.identifier.wosid | 000782468300260 | - |
dc.identifier.scopusid | 2-s2.0-85125355066 | - |
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