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dc.contributor.authorZhai, Min-
dc.contributor.authorLocquet, A.-
dc.contributor.authorJung, Mi-
dc.contributor.authorWoo, Deokha-
dc.contributor.authorCitrin, D. S.-
dc.date.accessioned2024-01-12T04:08:43Z-
dc.date.available2024-01-12T04:08:43Z-
dc.date.created2022-05-27-
dc.date.issued2021-
dc.identifier.issn2162-2027-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/77785-
dc.description.abstractThe structure and morphology of nanoporous alumina (NP Al2O3) films on Al substrates are investigated by terahertz (THz) reflectometry and scattering imaging. One inhomogeneous area is identified in THz C-scan results off specular conditions at various angles. The thickness of NP Al2O3 films calculated based on THz results is in excellent agreement with destructive cross-sectional field emission scanning electron microscopy (FE-SEM) measurements.-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleCharacterization of nanoporous alumina using terahertz reflectometry and scattering imaging-
dc.typeConference-
dc.identifier.doi10.1109/IRMMW-THz50926.2021.9567113-
dc.description.journalClass1-
dc.identifier.bibliographicCitation46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz)-
dc.citation.title46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz)-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlaceELECTR NETWORK-
dc.citation.conferenceDate2021-08-30-
dc.relation.isPartOf2021 46TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ)-
dc.identifier.wosid000782468300260-
dc.identifier.scopusid2-s2.0-85125355066-
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KIST Conference Paper > 2021
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