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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.contributor.author신동기-
dc.contributor.author이남양-
dc.contributor.author고근하-
dc.contributor.author이윤희-
dc.date.accessioned2024-01-12T05:36:22Z-
dc.date.available2024-01-12T05:36:22Z-
dc.date.issued1998-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78775-
dc.title접합된　반도체　기판쌍의　비접합영역　관찰을　위한　시편　제조방법-
dc.typePatent-
dc.date.registration1998-09-29-
dc.date.application1996-10-10-
dc.identifier.patentRegistrationNumber5,814,528-
dc.identifier.patentApplicationNumber08/729,064-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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