접합된 반도체 기판쌍의 비접합영역 관찰을 위한 시편 제조방법

Author
주병권오명환신동기이남양고근하이윤희
Assignee
한국과학기술연구원
Regitration Date
1998-09-29
Registration No.
5,814,528
Application Date
1996-10-10
Application No.
08/729,064
Country
US
URI
https://pubs.kist.re.kr/handle/201004/78775
Appears in Collections:
KIST Patent > Others
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