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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.contributor.author박흥우-
dc.date.accessioned2024-01-12T05:36:25Z-
dc.date.available2024-01-12T05:36:25Z-
dc.date.issued1999-09-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78777-
dc.title중간　삽입층을　이용한　직접　접합　공정과　이를　이용하는　전계방출　소자의진공실장공정　및　실리사이드　제조공정-
dc.typePatent-
dc.date.registration1999-09-15-
dc.date.application1996-12-27-
dc.identifier.patentRegistrationNumber234002-
dc.identifier.patentApplicationNumber96-73596-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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