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dc.contributor.author김영환-
dc.contributor.author한택상-
dc.contributor.author조운조-
dc.date.accessioned2024-01-12T05:37:24Z-
dc.date.available2024-01-12T05:37:24Z-
dc.date.issued2000-09-23-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78825-
dc.title박막　제조용　진공　장비의　회전식　기판　가열　장치-
dc.typePatent-
dc.date.registration2000-09-23-
dc.date.application1997-09-03-
dc.identifier.patentRegistrationNumber275783-
dc.identifier.patentApplicationNumber97-45606-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > Others
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