KIST Library Institutional Repository

박막　제조용　진공　장비의　회전식　기판　가열　장치

Author

김영환; 한택상; 조운조

Assignee

한국과학기술연구원

Regitration Date

2000-09-23

Registration No.

275783

Application Date

1997-09-03

Application No.

97-45606

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/78825

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML