DSpace at KISTKIST Patent2000

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dc.contributor.author나종갑-
dc.date.accessioned2024-01-12T06:01:53Z-
dc.date.available2024-01-12T06:01:53Z-
dc.date.issued2002-04-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/79178-
dc.title스퍼터링　타겟의　제조방법-
dc.typePatent-
dc.date.registration2002-04-09-
dc.date.application2000-06-14-
dc.identifier.patentRegistrationNumber333502-
dc.identifier.patentApplicationNumber00-32685-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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