KIST Library Institutional Repository

스퍼터링　타겟의　제조방법

Author

나종갑

Assignee

한국과학기술연구원

Regitration Date

2002-04-09

Registration No.

333502

Application Date

2000-06-14

Application No.

00-32685

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/79178

Appears in Collections:

KIST Patent > 2000

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