DSpace at KIST: Inner Trench Type Tungsten Nano Dot Arrays Patterned by Using Diblock Copolymer Templates and Selective Ion Etching

Full metadata record

DC Field	Value	Language
dc.contributor.author	Park, Min Chul	-
dc.date.accessioned	2024-01-12T07:56:56Z	-
dc.date.available	2024-01-12T07:56:56Z	-
dc.date.created	2022-01-14	-
dc.date.issued	2006-06-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/81615	-
dc.publisher	IEEE-NANO	-
dc.title	Inner Trench Type Tungsten Nano Dot Arrays Patterned by Using Diblock Copolymer Templates and Selective Ion Etching	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on	-
dc.citation.title	Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on	-
dc.citation.conferencePlace	US	-
dc.relation.isPartOf	Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on	-

Show Simple Item Record

KIST Library Institutional Repository