반도체 웨이퍼 접합을 위한 시료 고정장치

Author
변영태이석김재헌김선호
Assignee
한국과학기술연구원
Regitration Date
2005-08-01
Registration No.
0507331
Application Date
2003-03-21
Application No.
2003-0017651
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81648
Appears in Collections:
KIST Patent > 2003
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