KIST Library Institutional Repository

이온클러스터빔을　이용한　반도체소자용구리박막　제조방법

Author

고석근; 김기환; 정형진

Assignee

한국과학기술연구원

Regitration Date

1998-09-01

Registration No.

162867

Application Date

1995-07-21

Application No.

95-21554

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/81908

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML