Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | CHO, IL JOO | - |
| dc.date.accessioned | 2024-01-12T08:14:50Z | - |
| dc.date.available | 2024-01-12T08:14:50Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 2006-04-15 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/81932 | - |
| dc.publisher | NTFRL | - |
| dc.title | Study of PZT degradation during wafer-level bonding of thermo-piezoelectric cantilevers with CMOS wafer for probe-based data storage | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | 18th international symposium on integrated ferroelectrics | - |
| dc.citation.title | 18th international symposium on integrated ferroelectrics | - |
| dc.citation.conferencePlace | US | - |
| dc.relation.isPartOf | 18th international symposium on integrated ferroelectrics | - |
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- KIST Conference Paper > 2006
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