DSpace at KIST: Transfer of Si3N4 Cantilever Array on a CMOS Circuit Using New Wafer Level Bonding for Probe-Based Nano Data Storage Application

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DC Field	Value	Language
dc.contributor.author	CHO, IL JOO	-
dc.date.accessioned	2024-01-12T08:14:52Z	-
dc.date.available	2024-01-12T08:14:52Z	-
dc.date.created	2022-01-14	-
dc.date.issued	2006-04-15	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/81933	-
dc.publisher	IUMRS	-
dc.title	Transfer of Si3N4 Cantilever Array on a CMOS Circuit Using New Wafer Level Bonding for Probe-Based Nano Data Storage Application	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	MRS 2006	-
dc.citation.title	MRS 2006	-
dc.citation.conferencePlace	US	-
dc.relation.isPartOf	MRS 2006	-

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