DSpace at KIST: Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe based data storage

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DC Field	Value	Language
dc.contributor.author	CHO, IL JOO	-
dc.date.accessioned	2024-01-12T08:15:08Z	-
dc.date.available	2024-01-12T08:15:08Z	-
dc.date.created	2022-01-14	-
dc.date.issued	2006-01-15	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/81945	-
dc.publisher	IEEE	-
dc.title	Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe based data storage	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	IEEE International Conference on MEMS, pp.247 - 250	-
dc.citation.title	IEEE International Conference on MEMS	-
dc.citation.startPage	247	-
dc.citation.endPage	250	-
dc.citation.conferencePlace	TU	-
dc.relation.isPartOf	IEEE International Conference on MEMS	-

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