Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | CHO, IL JOO | - |
| dc.date.accessioned | 2024-01-12T08:17:16Z | - |
| dc.date.available | 2024-01-12T08:17:16Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 2005-05-15 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/82042 | - |
| dc.publisher | ETH | - |
| dc.title | Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensor for SPM DATA Storage Applications | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | 1st Korea-Switzerland Science & Technology | - |
| dc.citation.title | 1st Korea-Switzerland Science & Technology | - |
| dc.citation.conferencePlace | SZ | - |
| dc.relation.isPartOf | 1st Korea-Switzerland Science & Technology | - |
- Appears in Collections:
- KIST Conference Paper > 2005
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