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dc.contributor.author나종갑-
dc.date.accessioned2024-01-12T08:35:25Z-
dc.date.available2024-01-12T08:35:25Z-
dc.date.issued1999-09-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82199-
dc.title자성　박막　형성을　위한　스파터링　타겟　및　그　제조방법-
dc.typePatent-
dc.date.registration1999-09-21-
dc.date.application1997-02-25-
dc.identifier.patentRegistrationNumber5,955,685-
dc.identifier.patentApplicationNumber08/805,742-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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