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양성자 이온 주입에 의한 Si 표면의 blistering 연구

Authors

Kim, Sun Ho

Issue Date

2003-05-01

Citation

제 10회 광전자 및 광통신 학술회의(COOC 2003), pp.469 - 470

URI

https://pubs.kist.re.kr/handle/201004/82747

Appears in Collections:

KIST Conference Paper > 2003

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