DSpace at KISTKIST Patent2017

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dc.contributor.author도정만-
dc.contributor.author윤진국-
dc.contributor.author최영준-
dc.contributor.author유병용-
dc.contributor.author한승희-
dc.date.accessioned2024-01-12T09:07:53Z-
dc.date.available2024-01-12T09:07:53Z-
dc.date.issued2018-07-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82945-
dc.title실리콘 웨이퍼 및 반도체 반응기용 알루미늄 합금 및 내식/내침식 PEO 코팅-
dc.typePatent-
dc.date.registration2018-07-04-
dc.date.application2017-01-09-
dc.identifier.patentRegistrationNumber1877017-
dc.identifier.patentApplicationNumber2017-0003064-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2017
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