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dc.contributor.author김형준-
dc.contributor.author김상현-
dc.contributor.author임희정-
dc.contributor.author김연수-
dc.contributor.author심재필-
dc.date.accessioned2024-01-12T09:08:25Z-
dc.date.available2024-01-12T09:08:25Z-
dc.date.issued2018-08-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82969-
dc.title변형된 저마늄을 포함하는 반도체 소자의 제조 방법 및 이에 의해 제조된 반도체 소자-
dc.typePatent-
dc.date.registration2018-08-10-
dc.date.application2016-09-13-
dc.identifier.patentRegistrationNumber10-1889352-
dc.identifier.patentApplicationNumber2016-0118034-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2016
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