DSpace at KISTKIST Conference Paper2002

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dc.contributor.authorCHO, IL JOO-
dc.date.accessioned2024-01-12T09:16:39Z-
dc.date.available2024-01-12T09:16:39Z-
dc.date.created2022-01-14-
dc.date.issued2002-01-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/83317-
dc.publisherIEEE-
dc.titleA Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of IEEE the 15th International Conference on MEMS, pp.540 - 543-
dc.citation.titleProceedings of IEEE the 15th International Conference on MEMS-
dc.citation.startPage540-
dc.citation.endPage543-
dc.citation.conferencePlaceUS-
dc.relation.isPartOfProceedings of IEEE the 15th International Conference on MEMS-
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