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dc.contributor.authorCHO, IL JOO-
dc.date.accessioned2024-01-12T10:11:01Z-
dc.date.available2024-01-12T10:11:01Z-
dc.date.created2022-01-14-
dc.date.issued2000-07-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84353-
dc.publisherIEEE-
dc.titleAtomic Force Microscope Probe Tips Using Heavily Boron-Doped Silicon Cantilevers Realized in a <110> Bulk Silicon Wafer-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of International Microprocesses and Nanotechnology Conference, pp.230 - 231-
dc.citation.titleProceedings of International Microprocesses and Nanotechnology Conference-
dc.citation.startPage230-
dc.citation.endPage231-
dc.citation.conferencePlaceJA-
dc.relation.isPartOfProceedings of International Microprocesses and Nanotechnology Conference-
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KIST Conference Paper > 2000
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