Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | CHO, IL JOO | - |
dc.date.accessioned | 2024-01-12T10:11:01Z | - |
dc.date.available | 2024-01-12T10:11:01Z | - |
dc.date.created | 2022-01-14 | - |
dc.date.issued | 2000-07-15 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/84353 | - |
dc.publisher | IEEE | - |
dc.title | Atomic Force Microscope Probe Tips Using Heavily Boron-Doped Silicon Cantilevers Realized in a <110> Bulk Silicon Wafer | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | Proceedings of International Microprocesses and Nanotechnology Conference, pp.230 - 231 | - |
dc.citation.title | Proceedings of International Microprocesses and Nanotechnology Conference | - |
dc.citation.startPage | 230 | - |
dc.citation.endPage | 231 | - |
dc.citation.conferencePlace | JA | - |
dc.relation.isPartOf | Proceedings of International Microprocesses and Nanotechnology Conference | - |
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