Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Yong Tae | - |
dc.date.accessioned | 2024-01-12T10:41:40Z | - |
dc.date.available | 2024-01-12T10:41:40Z | - |
dc.date.created | 2022-01-14 | - |
dc.date.issued | 1999-04-05 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/84933 | - |
dc.title | Characteristics of molybdenum nitride thin film by N2 ion implantation | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | , pp.0 | - |
dc.citation.startPage | 0 | - |
dc.citation.endPage | 0 | - |
dc.relation.isPartOf | MRS spring meeting | - |
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