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dc.contributor.authorKim, Yong Tae-
dc.date.accessioned2024-01-12T10:41:40Z-
dc.date.available2024-01-12T10:41:40Z-
dc.date.created2022-01-14-
dc.date.issued1999-04-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84933-
dc.titleCharacteristics of molybdenum nitride thin film by N2 ion implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation, pp.0-
dc.citation.startPage0-
dc.citation.endPage0-
dc.relation.isPartOfMRS spring meeting-
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KIST Conference Paper > Others
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