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dc.contributor.author민석기-
dc.contributor.author권철순-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T11:03:03Z-
dc.date.available2024-01-12T11:03:03Z-
dc.date.issued1999-05-24-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85144-
dc.title반도체　금속박막의　배선방법-
dc.typePatent-
dc.date.registration1999-05-24-
dc.date.application1996-04-04-
dc.identifier.patentRegistrationNumber215540-
dc.identifier.patentApplicationNumber96-10174-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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