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dc.contributor.author안광덕-
dc.contributor.author한동근-
dc.contributor.author이재형-
dc.contributor.author강종희-
dc.contributor.author이찬우-
dc.contributor.author김종만-
dc.date.accessioned2024-01-12T11:03:50Z-
dc.date.available2024-01-12T11:03:50Z-
dc.date.issued1999-12-24-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85178-
dc.title초고집적　반도체의　고해상도　레지스트재료용　지환족　유도체　및　그의 제조방법-
dc.typePatent-
dc.date.registration1999-12-24-
dc.date.application1998-03-09-
dc.identifier.patentRegistrationNumber0249453-
dc.identifier.patentApplicationNumber1998-0007697-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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