KIST Library Institutional Repository

초고집적　반도체의　고해상도　레지스트재료용　지환족　유도체　및　그의 제조방법

Author

안광덕; 한동근; 이재형; 강종희; 이찬우; 김종만

Assignee

한국과학기술연구원

Regitration Date

1999-12-24

Registration No.

0249453

Application Date

1998-03-09

Application No.

1998-0007697

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85178

Appears in Collections:

KIST Patent > Others

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