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dc.contributor.author임상호-
dc.contributor.author한석희-
dc.contributor.author최용석-
dc.contributor.author유광윤-
dc.contributor.author김희중-
dc.date.accessioned2024-01-12T11:04:11Z-
dc.date.available2024-01-12T11:04:11Z-
dc.date.issued2000-05-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85193-
dc.title자기변형　합금박막　실리콘　마이크로 캔티레버-
dc.typePatent-
dc.date.registration2000-05-20-
dc.date.application1998-01-31-
dc.identifier.patentRegistrationNumber0263741-
dc.identifier.patentApplicationNumber1998-0002647-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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