KIST Library Institutional Repository

자기변형　합금박막　실리콘　마이크로 캔티레버

Author

임상호; 한석희; 최용석; 유광윤; 김희중

Assignee

한국과학기술연구원

Regitration Date

2000-05-20

Registration No.

0263741

Application Date

1998-01-31

Application No.

1998-0002647

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85193

Appears in Collections:

KIST Patent > Others

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