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dc.contributor.author이재갑-
dc.contributor.author은광용-
dc.contributor.author백영준-
dc.date.accessioned2024-01-12T11:04:49Z-
dc.date.available2024-01-12T11:04:49Z-
dc.date.issued2001-05-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85221-
dc.title직류전원플라즈마화학증착법에　의한　다이아몬드막　합성장치-
dc.typePatent-
dc.date.registration2001-05-09-
dc.date.application1999-06-09-
dc.identifier.patentRegistrationNumber296392-
dc.identifier.patentApplicationNumber99-21389-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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