KIST Library Institutional Repository

직류전원플라즈마화학증착법에　의한　다이아몬드막　합성장치

Author

이재갑; 은광용; 백영준

Assignee

한국과학기술연구원

Regitration Date

2001-05-09

Registration No.

296392

Application Date

1999-06-09

Application No.

99-21389

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85221

Appears in Collections:

KIST Patent > Others

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