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dc.contributor.author고은정-
dc.contributor.author최정혜-
dc.date.accessioned2024-01-12T11:35:10Z-
dc.date.available2024-01-12T11:35:10Z-
dc.date.issued2019-12-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85787-
dc.title게이트 산화막의 터널링에 대한 유효산화물두께 및 임계산화물두께 예측-
dc.typePatent-
dc.date.registration2019-12-02-
dc.date.application2018-06-19-
dc.identifier.patentRegistrationNumber10-2053331-
dc.identifier.patentApplicationNumber2018-0070133-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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