Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Yong Tae | - |
| dc.date.accessioned | 2024-01-12T11:41:21Z | - |
| dc.date.available | 2024-01-12T11:41:21Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 1994-07-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/86029 | - |
| dc.title | TEM studies of plasma deposited tungsten and tungsten nitride barriers for thermally stable metallization | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Material Res. Soc. Symp.Proc, pp.335 - 340 | - |
| dc.citation.title | Material Res. Soc. Symp.Proc | - |
| dc.citation.startPage | 335 | - |
| dc.citation.endPage | 340 | - |
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