DSpace at KISTKIST Patent2017

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dc.contributor.author조철진-
dc.contributor.author김상태-
dc.contributor.author백승협-
dc.contributor.author김성근-
dc.contributor.author최지원-
dc.contributor.author김진상-
dc.contributor.author강종윤-
dc.date.accessioned2024-01-12T12:00:30Z-
dc.date.available2024-01-12T12:00:30Z-
dc.date.issued2018-08-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86167-
dc.title반도체 메모리 소자용 커패시터 산화물 전극 제조법-
dc.typePatent-
dc.date.registration2018-08-22-
dc.date.application2017-03-09-
dc.identifier.patentRegistrationNumber10-1892632-
dc.identifier.patentApplicationNumber2017-0030046-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2017
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