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마이크로 볼로미터를 위한 바나듐 산화물 박막 제조 방법

Author

백승협; 길태현; 이기석; 최원준; 백정민; 김상현

Assignee

한국과학기술연구원

Regitration Date

2019-11-26

Registration No.

10488263

Application Date

2019-06-25

Application No.

16/451736

Country

US

URI

https://pubs.kist.re.kr/handle/201004/86168

Appears in Collections:

KIST Patent > 2019

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