DSpace at KISTKIST Patent2012

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dc.contributor.author박민철-
dc.contributor.author전영민-
dc.contributor.author우덕하-
dc.contributor.author조정근-
dc.contributor.author조성진-
dc.contributor.author이동수-
dc.date.accessioned2024-01-12T12:30:34Z-
dc.date.available2024-01-12T12:30:34Z-
dc.date.issued2013-10-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86737-
dc.title극자외선 포토 리소그래피용 마스크 결함 분석을 위한 결맞음 회절 이미징 촬영 카메라 자동 정렬 시스템-
dc.typePatent-
dc.date.registration2013-10-22-
dc.date.application2012-11-27-
dc.identifier.patentRegistrationNumber10-1322909-
dc.identifier.patentApplicationNumber2012-0135482-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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