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dc.contributor.author김진상-
dc.contributor.author윤석진-
dc.contributor.author권성도-
dc.contributor.author김현재-
dc.contributor.author김정훈-
dc.contributor.author정대용-
dc.date.accessioned2024-01-12T13:01:06Z-
dc.date.available2024-01-12T13:01:06Z-
dc.date.issued2009-02-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87314-
dc.title고품질 박막 증착을 위한 화학적 기판처리 방법 및 이를 이용한 박막형 열전소재의 제조방법-
dc.typePatent-
dc.date.registration2009-02-05-
dc.date.application2007-05-23-
dc.identifier.patentRegistrationNumber10-0883332-
dc.identifier.patentApplicationNumber10-2007-0050002-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2007
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