DSpace at KISTKIST Patent2004

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dc.contributor.author이태경-
dc.contributor.author박용주-
dc.date.accessioned2024-01-12T13:04:22Z-
dc.date.available2024-01-12T13:04:22Z-
dc.date.issued2006-03-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87454-
dc.title실리콘 나노 입자를 포함하는 다층 구조의 실리콘화합물 박막 및 그 제조방법-
dc.typePatent-
dc.date.registration2006-03-28-
dc.date.application2004-05-06-
dc.identifier.patentRegistrationNumber0567395-
dc.identifier.patentApplicationNumber2004-0031889-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2004
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