KIST Library Institutional Repository

펄스　플라즈마를　이용한　이온　주입　방법　및　그　시스템

Author

이연희; 한승희

Assignee

한국과학기술연구원

Regitration Date

2004-01-15

Registration No.

0416715

Application Date

2001-02-27

Application No.

2001-0009862

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87567

Appears in Collections:

KIST Patent > 2001

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