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dc.contributor.author박경현-
dc.contributor.author김동환-
dc.contributor.author변영태-
dc.contributor.author최상삼-
dc.contributor.author이규행-
dc.contributor.author김선호-
dc.date.accessioned2024-01-12T13:31:42Z-
dc.date.available2024-01-12T13:31:42Z-
dc.date.issued1994-05-26-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87919-
dc.title레이저　리소그라피　장치에서　간섭계를이용한　촛점찾는　방법-
dc.typePatent-
dc.date.registration1994-05-26-
dc.date.application1991-07-05-
dc.identifier.patentRegistrationNumber73984-
dc.identifier.patentApplicationNumber91-11402-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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