KIST Library Institutional Repository

레이저　리소그라피　장치에서　간섭계를이용한　촛점찾는　방법

Author

박경현; 김동환; 변영태; 최상삼; 이규행; 김선호

Assignee

한국과학기술연구원

Regitration Date

1994-05-26

Registration No.

73984

Application Date

1991-07-05

Application No.

91-11402

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87919

Appears in Collections:

KIST Patent > Others

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