KIST Library Institutional Repository

실리콘　반도체소자의　금속배선　형성용텅스텐　질화　박막증착방법

Author

민석기; 김용태

Assignee

한국과학기술연구원

Regitration Date

1996-01-30

Registration No.

5,487,923

Application Date

1993-11-23

Application No.

08/155,915

Country

US

URI

https://pubs.kist.re.kr/handle/201004/87937

Appears in Collections:

KIST Patent > Others

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